【作者】Xinmin Shen, Qunzhang Tu, Guoliang Jiang
【文章标题】Mechani ysis on finishing of reaction-sintered silicon carbide by combination of water vapor plaa oxidation and ceria slurry polishing
【期刊名,年份,卷(期),起止页*****】Opt. Eng. 54(5), 055106 (May 22, 2015). doi:10.1117/1.OE.54.5.055106
【全文链接】 doi:10.1117/1.OE.54.5.055106