愚愚学园 外文期刊互助 Device for the precise shape correction of optical surfaces by ion-beam and reactive plasma etching

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Device for the precise shape correction of optical surfaces by ion-beam and reactive plasma etching

【作者】I. G. ZabrodinB. A. ZakalovI. A. Kas’kov
【文章标题】Device for the precise shape correction of optical surfaces by ion-beam and reactive plaa etching
【期刊名，年份，卷（期），起止页*****】Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques
September 2013, Volume 7, Issue 5, pp 913–915
【全文链接】https://link.springer.com/article/10.1134/S1027451013040216

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