【作者】M. M. BaryshevaYu. A. VainerB. A. Gribkov
【文章标题】Evolution of the roughness of amorphous quartz surfaces and Cr/Sc multilayer structures upon exposure to ion-beam etching
【期刊名,年份,卷(期),起止页*****】Bulletin of the Russian Academy of Sciences: Physics
January 2011, Volume 75, Issue 1, pp 61–63
【全文链接】
https://link.springer.com/article/10.3103/S1062873811010254